System and method for lithography simulation

ABSTRACT

There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of, and system for simulating, verifying, inspecting, characterizing, determining and/or evaluating the lithographic designs, techniques and/or systems, and/or individual functions performed thereby or components used therein. In one embodiment, the present invention is a system and method that accelerates lithography simulation, inspection, characterization and/or evaluation of the optical characteristics and/or properties, as well as the effects and/or interactions of lithographic systems and processing techniques. In this regard, in one embodiment, the present invention employs a lithography simulation system architecture, including application-specific hardware accelerators, and a processing technique to accelerate and facilitate verification, characterization and/or inspection of a mask design, for example, RET design, including detailed simulation and characterization of the entire lithography process to verify that the design achieves and/or provides the desired results on final wafer pattern. The system includes: (1) general purpose-type computing device(s) to perform the case-based logic having branches and inter-dependency in the data handling and (2) accelerator subsystems to perform a majority of the computation intensive tasks.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to: U.S. Provisional Application Ser.No. 60/509,600, entitled “System and Method of Fast LithographySimulation”, filed Oct. 7, 2003 (hereinafter “the ProvisionalApplication”). The contents of the Provisional Application areincorporated by reference herein in their entirety.

BACKGROUND OF THE INVENTION

This invention relates to systems and techniques that are used tomeasure, inspect, characterize, simulate and/or evaluate the performanceof lithographic systems and techniques; and more particularly, in oneaspect, to measure, inspect, characterize, simulate and/or evaluate theoptical characteristics and effects of lithographic systems andprocessing techniques (for example, systems and techniques implementedin the semiconductor fabrication/processing environments).

Briefly, in the semiconductor industry, microlithography (or simplylithography) is the process of printing the circuit patterns on asemiconductor wafer (for example, a silicon or GaAs wafer). Currently,optical lithography is the predominant technology used in volumesemiconductor manufacturing. Such lithography employs light in thevisible to deep ultraviolet spectrum range to expose the resist onwafer. In the future, extreme ultraviolet (EUV) and soft x-rays may beemployed. Following exposure, the resist is developed to yield a reliefimage.

In optical lithography, a photomask (often called mask or reticle) isfirst written using electron-beam or laser-beam direct-write tools. Atypical photomask for optical lithography consists of a glass (orquartz) plate of six to eight inches on a side, with one surface coatedwith a thin metal layer (for example, chrome) of a thickness of about100 nm. The chip pattern is etched into the metal layer, hence allowinglight to transmit through. The area where the metal layer is not etchedaway blocks light transmission. In this way, a pattern may be projectedonto a semiconductor wafer.

The photomask contains certain patterns and features that are used tocreate desired circuit patterns on a wafer. The tool used in projectingthe mask image onto wafer is called a stepper or scanner (hereinaftercollectively called “photolithographic equipment”, “scanner”, or“stepper”). With reference to FIG. 1, the block diagram schematic of anoptical projection lithographic system 10 of a conventional stepperincludes an illumination source 12, an illumination pupil filter 14,lens subsystem 16 a-c, mask 18, projection pupil filter 20, and wafer 22on which the aerial image of mask 18 is projected.

With reference to FIG. 1, by way of background, illumination source 12may be laser source operated, for example, at UV (ultra-violet) or DUV(deep ultra-violet) wavelengths. The light beam is been expanded andscrambled before it is incident on illumination pupil 14. Theillumination pupil 14 may be a simple round aperture, or havespecifically designed shapes for off-axis illumination. Off-axisillumination may include, for example, annular illumination (i.e., thepupil is a ring with a designed inner and outer radius), quadrupleillumination (i.e., the pupil has four openings in the four quadrant ofthe pupil plane), and other shapes like dipole illumination. FIGS. 2Aand 2B illustrate exemplary annular and quadruple illumination,respectively.

With continued reference to FIG. 1, after illumination pupil 14, thelight passes through the illumination optics (for example, lenssubsystem 16 a) and is incident on photomask (or mask) 18. The mask 18contains the circuit pattern to be imaged on wafer 22 by the projectionoptics. As the desired pattern size on wafer 22 becomes smaller andsmaller, and that pattern becomes closer and closer to each other, thelithography process becomes more challenging. In an effort to improveimaging quality, current processing techniques employ resolutionenhancement technologies (“RET”), such as, for example, opticalproximity correction (“OPC”), phase shift masks (“PSM”), off-axisillumination (“OAI”), condenser and exit pupil filters, and techniquesapplying multi-level illumination (for example, FLEX).

Many of the RET technologies are applied on or directly to mask 18. Forexample, OPC and PSM, which modify the light wave to (1) compensate theimperfection of the imaging property of the projection optics, forexample, the OPC technology is used to compensate the optical proximityeffect due to light interference, and/or (2) take advantage of designedlight interferences to enhance the imaging quality, for example, thephase shift mask technology is used to create phase shifting betweenneighboring patterns to enhance resolution.

Notably, mask 18 may not be “perfect”, due to its own manufacturingprocess. For example, corners on mask 18 may not be sharp but may berounded; and/or the linewidth may have a bias from design value wherethe bias may also depend on the designed linewidth value and neighboringpatterns. These imperfections on mask 18 may affect the final imagingquality.

The projection optics (for example, lens subsystems 16 b and 16 c, andprojection pupil filer 20) images mask 18 onto wafer 22. In this regard,the projection optics includes a projection pupil filter 20. The pupil20 limits the maximum spatial frequency of the mask pattern that can bepassed through the projection optics system. A number called “numericalaperture” or NA often characterizes pupil 20. There are also proposedRET techniques that modify pupil 20, which is generally called pupilfiltering. Pupil filtering may include modulation for both the amplitudeand the phase on the passing light beams.

Due to the wavelength of light being finite, and current techniquesemploying wavelengths that are larger than the minimum linewidth that isprinted on wafer 22, there are typically significant light interferenceand diffractions during the imaging process. The imaging process is nota perfect replication of the pattern on mask 18. Current techniquesemploy physical theory to model this imaging process. Further, due tothe high NA value of current lithography tools, different polarizationsof the light provide different imaging property. To more accuratelymodel this process, a vector-based model may be used.

The projection optics may be diffraction-limited. However, lenssubsystem 16 c in the projection optics is most often not completely“perfect”. These imperfections may be modeled as aberrations, which areoften abstracted as some undesired phase modulation at the pupil plane,and are often represented by a set of Zernike coefficients. After thelight finally reaches the surface of wafer 22, they will furtherinteract with the coatings on wafer 22 (for example, the photo-resist).In this regard, different resist thickness, different optical propertiesof the resist (for example, its refractive index), and differentmaterial stack under the resist (for example,bottom-anti-reflection-coating or BARC), may further affect the imagingcharacteristics itself. Some of these effects may also be abstracted bya modulation at the pupil plane.

When the resist is exposed by the image and thereafter baked anddeveloped, the resist tends to undergo complex chemical and physicalchanges. First principle and empirical models have been developed tosimulate these processes.

To design and evaluate the specific implementations of the mask,including a mask implementing RET, and to assess the impact on thequality of the printed pattern on wafer from the RET design combinedwith the stepper settings and characteristics, computer simulations havebeen employed to imitate the anticipated and/or expected results.Notably, physical models have been developed for nearly every step ofthe lithography process, including mask making, stepper's imaging pathfrom illumination to on-wafer image, and the resist exposure anddevelopment.

Currently, there are a number of computer software techniques thataddress needs in lithography simulation. For example, there isfirst-principle-modeling-based simulation software that conductsdetailed simulation of the physical and chemical processes, but runsextremely slow and hence limited to extremely small area of chip design(on the order of a few square microns), for example, “SOLID-C” fromSigma-C (Campbell, Calif., USA) and “Prolith” from KLA-Tencor (San Jose,Calif., USA). Although there is computer software that executes andprovides simulation results faster, such software uses empirical modelsthat are calibrated to the experimental data (for example, “Calibre”from Mentor-Graphics (Wilsonville, Oreg., USA). Even for the “fast”simulation that uses empirical model, a simulation at a full-chip leveloften requires tens of hours to many days.

Moreover, to more fully understand, design, analyze and/or predict thelithography process, the entire process, from illumination—to mask—toimaging—to resist, should, or may need to be analyzed and/or simulated.Due to the complex models and the large amount of design data (today'sVLSI design data can reach tens of GB per layer), brute-forcecomputation on general-purpose microprocessors tends to be unwieldy andtime-consuming. Further, employing highly specialized mainframecomputers would likely require an extensive investment thereby makingthe process uneconomical.

There is a need for a system and technique that accelerates lithographysimulation, inspection, characterization and/or evaluation of theoptical characteristics and/or properties, as well as the effects and/orinteractions of lithographic systems and processing techniques thatovercome one, some or all of the shortcomings of the conventionalsystems and approaches. There is a need for a system and technique thatfacilitates verification, characterization and/or inspection of RETdesigns, including detailed simulation of the entire lithography processto verify that the RET design achieves and/or provides the desiredresults on final wafer pattern.

Moreover, there exists a need for a system and technique that rapidlysimulates, characterizes, inspects, verifies and/or enables RET designsand photolithographic equipment optimization and processes (for example,critical dimension (“CD”, i.e., linewidth of the critical lines in theintegrated circuit design), line-end pullback, edge placement error forone, some or every pattern at one, some or every location, and/orprinting sensitivity to process variations such as mask error, focus,dose, numerical aperture, illumination aperture and/or aberration).

SUMMARY OF THE INVENTION

There are many inventions described and illustrated herein. In oneaspect, the present invention is a system and method that accelerateslithography simulation, inspection, characterization and/or evaluationof the optical characteristics and/or properties, as well as the effectsand/or interactions of lithographic systems and processing techniques.In a first principal aspect, the present invention is a system andmethod for simulating a lithographic design comprised of a plurality ofpolygons (which may or may not include resolution enhancementtechnology(ies)) arranged in a predetermined configuration. The systemof this aspect of the invention comprises a microprocessor subsystem toconvert the plurality of polygons to a pixel-based bitmap representationthereof (for example, a multi-level image such as 2, 4, 8, . . . 64,128, 256 or gray-level). The pixel-based bitmap includes pixel data,wherein each pixel datum represents a pixel having a predetermined pixelsize.

The system further includes an accelerator subsystem, coupled to themicroprocessor subsystem, to calculate at least a portion of the aerialimage of the lithographic design using the pixel-based bitmaprepresentation of the lithographic design. The accelerator subsystemincludes a plurality of programmable gate arrays configured to processthe pixel data in parallel.

In one embodiment, the pixel size may be greater than the Nyquistfrequency in the aerial image of the lithographic design and/ordetermined using the numerical aperture and wavelength of a projectionoptics of a lithographic tool.

In another embodiment, the system includes a plurality of acceleratorsubsystems, each accelerator subsystem being coupled to themicroprocessor subsystem and provided a portion of the pixel-basedbitmap. Each accelerator subsystem calculates an aerial image of thelithographic design corresponding to the portion of the pixel-basedbitmap using the pixel data associated therewith. The plurality ofaccelerator subsystems, in one embodiment, each performs Fast FourierTransforms, using pixel data, to generate the corresponding portion ofthe aerial image. Notably, the microprocessor subsystem of theseembodiments may include a plurality of microprocessors wherein eachmicroprocessor is coupled to at least one associated acceleratorsubsystem.

The accelerator subsystem may also calculate an aerial image in resistformed on a wafer using the pixel-based bitmap representation of thelithographic design and a coefficient matrix representing projection andillumination optics of a lithographic tool.

The accelerator subsystem may calculate a pattern formed on the wafer bythe lithographic design using the pixel-based bitmap representation ofthe lithographic design and the coefficient matrix representingprojection and illumination optics of a lithographic tool.

The system of this invention may also include a processing system,coupled to the microprocessor subsystem and the accelerator subsystem,to compare the calculated pattern on the wafer to a desired,predetermined pattern. The processing system may, in addition or in lieuthereof, (1) determine a CD of the lithographic design, (2) detect anerror in the lithographic design in response to a comparison between thecalculated pattern on the wafer and a desired/predetermined pattern,and/or (3) determine edge placement of the lithographic design using thecalculated pattern on the wafer. Notably, in response to detecting theerror, the processing system may determine a modification to thelithographic design to correct the error in the lithographic design.

Moreover, the processing system may determine a printing sensitivityusing patterns on the wafer calculated in response to varying thecoefficients of the matrix representing projection and illuminationoptics of a lithographic tool. The coefficients of the matrixrepresenting projection and illumination optics of a lithographic toolmay be representative of one or more of a focus, dose, numericalaperture, illumination aperture, and aberration. Indeed, the processingsystem may determine a set of parameters of the projection andillumination optics of the lithographic tool using the printingsensitivity.

In another principal aspect, the present invention is a system andmethod for simulating a lithographic design (comprised of plurality ofpolygons (which may or may not include resolution enhancementtechnology(ies)) arranged in a predetermined configuration). The systemcomprises a microprocessor subsystem, including a plurality ofmicroprocessors, to convert the lithographic design to a pixel-basedbitmap representation thereof (for example, a multi-level image such as2, 4, 8, . . . 64, 128, 256 or gray-level). The pixel-based bitmapincludes pixel data, wherein each pixel datum represents a pixel havinga predetermined pixel size (for example, determined using the numericalaperture and wavelength of a projection optics of a lithographic tooland/or greater than the Nyquist frequency in the aerial image of thelithographic design).

The system further includes a plurality of accelerator subsystems,wherein each accelerator subsystem includes a plurality of programmableintegrated circuits configured to process the pixel data in parallel. Inaddition, each accelerator subsystem is connected to an associatedmicroprocessor to calculate a portion of an aerial image of thelithographic design using the corresponding portion of the pixel-basedbitmap representation of the lithographic design. In certainembodiments, each of the accelerator subsystems performs Fast FourierTransforms, using pixel data, to generate the corresponding portion ofthe aerial image.

The plurality of accelerator subsystems, in one embodiment, calculate anaerial image in resist formed on a wafer by the lithographic designusing the pixel-based bitmap representation of the lithographic designand a coefficient matrix representing projection and illumination opticsof a lithographic tool. In another embodiment, the acceleratorsubsystems calculate a pattern formed on the wafer by the lithographicdesign using the pixel-based bitmap representation of the lithographicdesign and the coefficient matrix representing projection andillumination optics of a lithographic tool.

The system may further include a processing system, coupled to themicroprocessor subsystems and the accelerator subsystems, to: (1)compare the calculated pattern on the wafer to a desired/predeterminedpattern, and/or (2) determine a CD of the lithographic design using thecalculated pattern on the wafer, and/or (3) determine an edge placementof the lithographic design using the calculated pattern on the wafer,and/or (4) determine a printing sensitivity using patterns on the wafercalculated in response to varying the coefficients of the matrixrepresenting projection and illumination optics of a lithographic tool(for example, one or more of a focus, dose, numerical aperture,illumination aperture, and aberration of the projection and illuminationoptics). Indeed, the processing may determine a set of parameters of theprojection and illumination optics of the lithographic tool using theprinting sensitivity.

Moreover, the processing system may (in addition or in lieu thereofdetect an error in the lithographic design in response to a comparisonbetween the calculated pattern on the wafer and a desired, predeterminedpattern. In response to detecting the error, the processing systemdetermines a modification to the lithographic design to correct theerror in the lithographic design.

Again, there are many inventions described and illustrated herein. ThisSummary of the Invention is not exhaustive of the scope of the presentinvention. Moreover, this Summary is not intended to be limiting of theinvention and should not be interpreted in that manner. While certainembodiments, features, attributes and advantages of the inventions havebeen described in this Summary, it should be understood that manyothers, as well as different and/or similar embodiments, features,attributes and/or advantages of the present inventions, which areapparent from the description, illustrations and claims, which follow.

BRIEF DESCRIPTION OF THE DRAWINGS

In the course of the detailed description to follow, reference will bemade to the attached drawings. These drawings show different aspects ofthe present invention and, where appropriate, reference numeralsillustrating like structures, components, materials and/or elements indifferent figures are labeled similarly. It is understood that variouscombinations of the structures, components, materials and/or elements,other than those specifically shown, are contemplated and are within thescope of the present invention.

FIG. 1 is a schematic representation of the optical path in astep-and-repeat or step-and-scan optical lithography system withrefractive optics (referred to as stepper in later text). The maskcontains the circuit pattern to be imaged on the wafer by the reductionlens system;

FIGS. 2A and 2B illustrate exemplary conventional annular and quadrupleillumination pupils, respectively;

FOGURE 3 is a schematic block diagram of a lithographic simulationsystem, according to certain embodiments of certain aspects of thepresent inventions;

FIG. 4 is a flow chart of the simulation process, according to certainembodiments of certain aspects of the present inventions;

FIG. 5 is a schematic block diagram of a lithographic simulation system,according to certain embodiments of certain aspects of the presentinventions;

FIG. 6 is a schematic block diagram of an accelerator subsystemarchitecture of FIG. 5, according to certain embodiments of the presentinventions; and

FIG. 7 is a flow chart of the D:T inspection process, according tocertain embodiments of certain aspects of the present inventions.

DETAILED DESCRIPTION

There are many inventions described and illustrated herein. In oneaspect, the present invention is directed to a technique of, and systemfor simulating, verifying, inspecting, characterizing, determiningand/or evaluating the lithographic designs, techniques and/or systems,and/or individual functions performed thereby or components usedtherein. In one embodiment, the present invention is a system and methodthat accelerates lithography simulation, inspection, characterizationand/or evaluation of the optical characteristics and/or properties, aswell as the effects and/or interactions of lithographic systems andprocessing techniques. In this regard, in one embodiment, the presentinvention employs a lithography simulation system architecture,including application-specific hardware accelerators, and a processingtechnique to accelerate and facilitate verification, characterizationand/or inspection of a mask design, for example, RET design, includingdetailed simulation and characterization of the entire lithographyprocess to verify that the design achieves and/or provides the desiredresults on final wafer pattern. The system includes: (1) general purposecomputing device(s) to perform the case-based logic having branches andinter-dependency in the data handling and (2) accelerator system toperform a majority of the computation intensive tasks.

In particular, with reference to FIG. 3, in one embodiment, generalpurpose-type computing device(s) 112 are programmed and/or configured tohandle job management of the overall operations of system 110 including,for example, partitioning the design database for analysis andconversion by accelerator system 116. In addition, general purpose-typecomputing device(s) 112 facilitates interaction with the user oroperator (i.e., the “outside world”) via, for example, clientcomputer(s) (not illustrated) that provide operator or user access tosystem 110 for job setup and/or results review/analysis.

With continued reference to FIG. 3, accelerator system 116 may beprogrammed to perform case-based logic having branches andinter-dependency in the data handling. In this regard, acceleratorsystem 116 includes a microprocessor subsystem to manipulate and processthe polygon (or the like) patterns that are typical with conventionallithographic simulation and design systems/techniques. Since there aremany polygons in a typical design, and there are many different typesand cases of polygons, system 110 employs microprocessor subsystem ofaccelerator system 116 to implement programs or routines that manipulatethe case-based logic (for example, “if this case, then; else if, then;and so on”).

The accelerator system 116 further includes suitably a programmed andconfigured accelerator subsystem (including application-specifichardware accelerators) that is coupled to the microprocessor subsystemto perform pixel-based image processing (for example, pixel-basedgray-level image simulation). The pixel-based image processing mayinvolve pixel-based computation, for example, filtering, re-mapping,Fourier Transform or other types of transformation. In these pixel-basedcomputations, the data inter-dependency is minimized—which facilitatesimplementing parallel and pipelined computation.

With reference to FIG. 4, in one embodiment of the present invention,the lithography simulation, inspection, characterization and/orevaluation process includes pixel based lithography simulation. In thoseinstances where the design database is based on polygons or the like,system 110 converts the polygon based database (containing theparticular design) to a pixel-based image(s) (see, box 120 and 122).There are many techniques for converting a polygon (or the like) to amulti-level image (for example, 2, 4, 8, . . . 64, 128, 256 orgray-level image). All such techniques, whether now known or laterdeveloped, are intended to be within the scope of the present invention.For example, one method of conversion involves two major processes:

-   -   (1) Fill a sub-pixel binary bitmap using scan-line process or        technique. The sub-pixel size can be selected to be a fraction        of the final pixel size, for example, ⅛ of a pixel. For each        sub-pixel, if the sub-pixel is within a polygon, the sub-pixel        is filled in 1; otherwise it is filled in 0. More sophisticated        techniques include dithering, which is able to increase the        filling resolution without reducing the sub-pixel size, but fill        some sub-pixels as 1 and others as 0 if some neighboring        sub-pixels are on the polygon edge (hence not completely inside        nor completely outside a polygon).

Dithering is a standard computer graphics technique; and/or

-   -   (2) Apply an anti-aliasing filter to the sub-pixel binary        bitmap, and at the same time down-sample the bitmap image to a        pixel-sized multi-level image (for example, gray level image).        Anti-aliasing filter is a standard technique in image        processing, and is used to limit the spatial frequency band of        the image before down-sampling, so as to avoid aliasing. The        design of the anti-aliasing filter needs to minimize the        frequency content that will be folded back into the frequency        band after down-sampling.

One significant advantage of using these two techniques in thepolygon-to-gray-image conversion is that the polygon overlap is thenautomatically addressed. That is, when there is overlap of a polygonstructure, a sub-pixel is filled with 1 twice when it resides in anoverlapped area (or “filled” with 1 multiple times if the overlapinvolves more than two polygons), with the final filled value stillbeing 1. So, any overlap is automatically resolved during the conversionprocess.

A significant decision in this image conversion step is the selection ofthe pixel size. In this regard, implementing a larger pixel size mayresult in a smaller amount of computation required in the downstream orlater processing, and a larger induced image processing error. In oneembodiment, the pixel size is selected so that it can sample the imageabove Nyquist frequency in the aerial image. It is well known in thescience of optical lithography that, regardless of illumination, partialcoherence, and/or RET (for example, OPC and PSM) on masks, the maximumspatial frequency in the light intensity distribution on wafer plane maybe characterized as 2×NA/λ, where NA is the Numerical Aperture of thestepper projection optics, and λ is the wavelength used in the imaging.It is also known in image processing that, if the sampling frequency isabove twice of the maximum spatial frequency existing in the originalimage, one can accurately re-construct the original image from thesampled image. This is known as the Nyquist theorem, and the 2× of themaximum existing spatial frequency in the original image is called theNyquist frequency. Accordingly, employing this relationship, the Nyquistsampling rate for aerial image in a stepper is 4×NA/λ. As such, thepixel size may be at p=λ/(4×NA) or smaller. For examples, for wavelengthof 193 nm, and NA=0.65, the pixel size p may be 74 nm or smaller. Forwavelength of 248 nm, and NA=0.65, the pixel size p may be 95 nm orsmaller.

It should be noted that the pixel size selection described above is atthe wafer aerial image level. Certain steppers implement an image sizereduction when imaging from mask to wafer, and the pixel size on maskmay be adjusted. For example, if the stepper reduction ratio is 4×, thenthe Nyquist sampling pixel size on mask is 4× larger than that on thewafer. Thus, under these circumstances, the sampling pixel size may beadjusted.

The converted pixel-based gray level image is representative of themask. Mask RET (for example, OPC and PSM) may be incorporated into thisimage, since the RET features are typically part of the polygondatabase. For example, in the context of OPC, the decorations aretypically extra polygons, so they automatically become part of thegray-level image. In the context of PSM, if there are only two types ofphases “0” and “180” degrees, the sub-pixel bitmap may be filled with“−1” in the 180-degree phase region during the polygon-to-bitmapconversion, and the final gray-level image will involve both positiveand negative values. Indeed, where the PSM includes phase differencesbeyond just 0 and 180 degrees, the bitmap value may include acorresponding phase factor, and the gray-level image may also consist ofcomplex numbers, where a complex number includes real and imaginarypart.

As mentioned above, conversion of the design database (consisting ofpolygons or the like) to a pixel-based image(s) (see, box 120 and 122)is performed and/or accomplished by the microprocessor subsystem ofaccelerator system 116.

In one embodiment, anti-aliasing filtering techniques may be implemented(see, box 122). That is, since the anti-aliasing filtering may beimplemented as a linear operation, the different phase layers may beconverted to binary bitmap then to a multi-level image (for example,gray-level image) individually, then multiplied with their individualphase factor, then added up to obtain a final multi-level image (forexample gray-level image) with complex pixel values. The anti-aliasingfiltering techniques (box 122), in one embodiment, may be performedand/or accomplished by accelerator system 116 using the binary bitmapimage of the polygon design database (output of box 120).

With continued reference to FIG. 4, after the design database isconverted to a gray-level image, in one embodiment, that image may beapplied to processing to model the systematic mask errors into the image(see, box 124). For example, common mask errors include bias and cornerrounding, caused by the imperfections in the mask's manufacturingprocess, for example, ebeam proximity effect and resist development.Corner rounding refers to the fact that corners on mask are not sharpbut rounded (caused by, for example, the finite size of writing beamspot, and the resist development low-pass effect), and can be modeled byintroducing an edge rounding effect for all corners, for example, usinga quarter of a circle to replace the sharp 90 degree intersection of twostraight edges.

Bias refers to the difference between the actual linewidth and thedesign value (which may be caused by, for example, the resistover-development or under-development). Notably, that difference maydepend on the designed linewidth value and neighboring patterns (causedby, for example, ebeam proximity effect). Bias can often be modeled by agray-level morphological operation on the image, with a dilation orerosion value that depends on the pattern's size and pattern'sneighborhood to account for the proximity effect. These techniques arewell known to those skilled in image processing.

Notably, the mask error modeling function (box 124) may be optional and,as such is represented in a dashed line format. For example, in thoseinstances where the masks are made with high quality techniques, thefinal effect on wafer due to mask error maybe negligible. Accordingly,this mask error modeling need not be implemented.

Further, the mask error modeling function (box 124), in one embodiment,may be performed and/or accomplished by the accelerator subsystem ofaccelerator system 116 using, for example, the bitmap image of thepolygon design database, as described above.

With continued reference to FIG. 4, the next process is to model theaerial imaging path through the projection optics and under the designedillumination scheme (see, box 126). The physical imaging model has beenwell established in optical science, either scalar or vector imagingmodel may be used. Vector model is becoming more important as theoptical lithography moves to high-NA systems (high NA generally refersto NA larger than 0.6). Over the past decade, there have been varioustechniques developed to speed up the computation.

One example is to decompose the total imaging system into a series ofcoherent imaging systems with decreasing importance, i.e., smaller andsmaller eigenvalues of a matrix called Transmission Cross Coefficients(TCC) which is a matrix defined by the projection and illuminationoptics but independent of the mask pattern itself. The decomposedcoherent systems are often called as eigen-systems. Depending on theaccuracy requirement, various numbers of eigen-systems can be included.The majority of the aerial image computations may employ Fast FourierTransforms (FFTs), both forward and backward, to generate the aerialimage. Because a diffraction-limited coherent optical imaging system maybe readily characterized as a series of Fourier Transforms, it may beadvantageous to employ FFTs to generate the aerial image of the design.All these transforms, when applied on pixel based image, may be regularpixel-based computations.

Further, the aerial image generation (box 126), in one embodiment, maybe performed and/or accomplished by accelerator subsystem 116 using, forexample, the bitmap image of the polygon design database as modified byadditional processing (for example, anti-aliasing filtering techniques122 and/or mask error modeling 124), if any.

During the aerial image generation/computation 126, the wafer-surfaceresist stack parameters (for example, thickness, BARC and/or refractiveindex) may be incorporated into the TCC equations. Various non-mask RETtechnologies may also be incorporated, for example, the off-axisillumination and pupil filtering, as part of the TCC computationequations. Further, the imperfections in optics, for example, aberrationand/or light scattering, may also be incorporated in the aerial imagingequations, by accordingly modifying the pupil filtering from ideal case.

With continued reference to FIG. 4, the aerial image in the resist isresponsible for exposing the resist itself. For a rigorousfirst-principle modeling (i.e., resist simulation 128), a 3D intensitydistribution of the aerial image inside the resist may be employed. Forcertain embodiments of resist modeling, a 2D aerial image distributionon one plane may be employed, for example, the aerial image at a certaindistance above the wafer surface. With the computed aerial image, manydifferent resist models may be applied. A resist model simulates and/ormodels the physical and chemical processes and predicts the finaldeveloped resist edge location, and/or resist profile. Notably, all suchmodels and modeling techniques, whether now known or later developed,are intended to be within the scope of the present invention.

In one embodiment, the edge locations and/or edge profile may becompared with experimental results, for example, SEM image, CD valuesmeasured by metrology tools (for example, CD-SEM, optical CD tools), toverify and calibrate the resist model parameters.

Notably, the resist modeling may be reduced to regular pixel-basedcomputation, for example, filtering, re-mapping, and hence is suitablefor hardware acceleration. As such, the resist modeling or simulation(box 128), in one embodiment, may be performed and/or accomplished byaccelerator subsystem 116 using, for example, the binary bitmap image ofthe polygon design database (see, box 120) directly, or using the bitmapimage of the polygon design database as modified by additionalprocessing (for example, anti-aliasing filtering techniques 122 and/ormask error modeling 124), or directly to the aerial image generatedthereby (see, box 126).

The next operation, also in a dashed box illustrated in FIG. 4, is themodeling of the substrate etching process (see, box 130). This operationis often unnecessary in current lithography simulation and/or analysis,since the etching process may be considered as a separate andindependent process from lithography. However, the etch process may beincorporated into the present invention.

Simulation of substrate etching processes may also be reduced topixel-based processing. As such, the etch process simulation (box 130),in one embodiment, may be performed and/or accomplished by acceleratorsubsystem 116 using, for example, the binary bitmap image of the polygondesign database (see, box 120) directly, or using the bitmap image ofthe polygon design database as modified by additional processing (forexample, anti-aliasing filtering techniques 122, mask error modeling124, and/or resist simulation 128), or directly to the aerial imagegenerated thereby (see, box 126).

With continued reference to FIG. 4, after determination and/oridentification of edge locations of a design, the printed pattern onwafer may be determined, inspected, characterized and/or evaluated (see,box 132). By connecting the edge points identified, the simulated waferpattern is constructed. These predicted wafer patterns may be used forvarious applications, for example, comparing to design-target (i.e., thedesired pattern on wafer) to verify that the RET design is indeedachieving its goal and has not generated errors. A discussion of variousand/or suitable applications (box 134) are provided in detail below.

In one embodiment of the present invention, hardware acceleration refersto the technique of using hardware (for example, electronic boardscontaining computing engines, communication chips and/or memories) thatis more efficient for pixel-based type of computation than generalpurpose-type microprocessor based computing device. The acceleratorhardware may be implemented with the highly configured and specificallyprogrammed general purpose-type computing devices (for example, generalpurpose microprocessors and/or programmable logic devices), and, assuch, offload significant computation processes from the microprocessor.In this way, the system computes simulation data in a more parallel andpipelined fashion.

For example, with reference to FIG. 3, in one embodiment, themicroprocessor subsystem of accelerator system 116 may handle thosecomputations that heavily depend on case-based logic, for example,polygon conversion to bitmap representation thereof, while acceleratorsubsystem of accelerator system 116 handles those computations that haveless (or little to no) data inter-dependency. As such, in thisconfiguration, the computational intensive tasks performed by theaccelerator subsystem may be parallelized and computed in a pipelinedfashion, for example, image filtering (box 122 of FIG. 4), imagetransformations such as a Fourier Transform (box 126 of FIG. 4) and/orresist modeling/simulation (box 128 of FIG. 4).

With reference to FIG. 5, in one embodiment, system 110 includes one ormore general purpose-type computing system 112, for example, applicationprocessing system 114 a and front-end processing system 114 b. Theapplication processing system 114 a is suitably configured to handle jobmanagement of the overall operations of system 110. In particular, inone embodiment, application processing system 114 a includes applicationprocessing device 136 and application SCSI RAID 138 a. The applicationprocessing device 136 is suitably programmed to provide management ofthe operations of the various components of system 110. In this regard,for example, application processing device 136 may be programmed topartition the design database for the various components of acceleratorsystem 116, thereby specifying the individual jobs, functions orprocesses performed by components of accelerator system 116. The SCSIRAID hard-disk array 138 a provides storage for the programs and data(for example, design database) used by application processing device136.

The front-end processing system 114 b includes front-end processingdevice 140 which is suitably programmed to handle or perform directinteraction with the user or operator (i.e., the “outside world”) via,for example, client computer(s) (not illustrated) that provide operatoror user access to system 110 for job setup and/or resultsreview/analysis. The SCSI RAID hard-disk array 138 b, associated withthe front-end processing device should be a high capacity storagedevice, since hard-disk array 138 b used to store results and images ofmany simulation jobs. The front-end processing system 114 b alsocommunicates with application processing system 114 a, to provide orretrieve data to or from application SCSI RAID 138 a (for example, thedesign database), and instructs the application processing system 114 ato start a job, as instructed by the user or operator.

With continued reference to FIG. 5, application processing system 114 aand front-end processing system 114 b connect with accelerator system116, for example, through high speed switches (for example,gigabit-Ethernet switches 142 a and 142 b). The switches 142 a and 142 bmay be Dell 5224 Power Connect, manufactured and provided by DellComputer (Austin, Tex., USA). The implementation and operation of theDell 5224 Power Connect are described in detail in application notes,technical/journal articles and data sheets, all of which areincorporated by reference herein.

In one embodiment, all or substantially all of the actualcomputationally intensive tasks may be conducted by accelerator system116, and, in particular, one or more accelerator components 116 a-n.This architecture of the present invention allows scalable computationcapacity, by changing the number of accelerator hardware components 116a-n. Moreover, this architecture also enables or enhances overallfault-tolerance of the system. For example, should a given acceleratorhardware component 116 a-n fail, its jobs may be re-assigned to theother accelerator hardware components 116 a-n, and, in this way, system110 maintains its operational condition/state.

In particular, accelerator system 116 may include one or moreaccelerator components 116 a-n, each having one of microprocessorsubsystem 144 a-n (including one or more microprocessors), one or moreaccelerator subsystems 146 a-n, and local or resident memory storage 148a-n coupled to an associated microprocessor subsystem 144 a-n. Theextent or amount of hardware acceleration capability may be balancedwith microprocessor subsystems 144 a-n, depending on the extent oramount of computation to be performed.

In one embodiment, microprocessor subsystems 144 a-n each includes twoXeon microprocessors manufactured by Intel (Santa Clara, Calif., USA).The accelerator subsystems 146 a-n each includes a plurality ofApplication-Specific Integrated Circuit (ASIC), special-purpose DSPintegrated circuits, and/or programmable gate arrays (for example,field-programmable gate arrays (“FPGAs”)). In fact, each of theaccelerator subsystem 146 a-n may include multiple acceleratorsubsystems, for example, accelerator subsystem 146 a may include all theaccelerator subsystems 146 a 1-146 ax, as illustrated in FIG. 5. In thisway, when fully utilized, each of the accelerator subsystems 146 a-ncontains computational capacity of roughly twenty-five Xeonmicroprocessors.

The bus 150 a-n facilitates high-speed communication betweenmicroprocessor subsystem 144 a-n and associated accelerator subsystem(s)146 a-n. The communication protocols and techniques on bus 150 a-n maybe PCI, PCIX, or other high-speed communication protocols andtechniques. Indeed, any high-speed technique, whether now known or laterdeveloped, may be implemented over bus 150 a-n. Notably, in oneembodiment, the bus interface may be implemented using a 21P100BGC PCI-Xbridge (64 bit/133 MHz) from International Business Machines Corporation(Armonk, N.Y., USA). The implementation and operation of the 21P100BGCare described in detail in application notes, technical/journal articlesand data sheets, all of which are incorporated by reference herein.

With reference to FIG. 6, in one embodiment, each accelerator subsystem146 a-n includes a plurality of programmable logic integrated circuits152 a-x, for example, high-end FPGA, coupled to associated high speedmemory 154 a-x (for example, DDR SDRAM, MT46V2M32V1 from MicronTechnologies of Boise, Id., USA) via a bus (for example, 64 bit/266MHz). In one embodiment, four FPGAs are implemented, each including 3million gates. The FPGAs may be XC2V3000, manufactured by Xilinx (SanJose, Calif., USA). The implementation and operation of the XC2V3000 aredescribed in detail in application notes, technical/journal articles anddata sheets, all of which are incorporated by reference herein.

The programmable logic 152 a-x are suitably programmed and configured toperform all or substantially all of the computations that have less (orlittle to no) data inter-dependency, for example, the anti-aliasingfiltering techniques (box 122 of FIG. 4), mask error modeling (box 124of FIG. 4), aerial image generation (box 126 of FIG. 4), resistsimulation (box 128 of FIG. 4) and/or wafer patter generation processing(box 132 of FIG. 4). As such, programmable logic 152 a-x is not employedto address those tasks that heavily depend on case-based logic, forexample, polygon conversion to binary bitmap (box 120 of FIG. 4).

With continued reference to FIG. 6, each accelerator subsystem 146 a-nfurther includes programmable logic 156, for example, complexprogrammable logic device (“CPLD”) coupled to associated non-volatilememory 158 (for example, Flash memory, TE28F128J3A-150 from Intel (SantaClara, Calif., USA). In one embodiment, CPLD may be XCR3384XL-10TQ144,manufactured by Xilinx (San Jose, Calif., USA). In short, the CPLD isused to program FPGA by transferring FPGA code from the FLASH. Theimplementation and operation of the XCR3384XL-1 OTQ144 are described indetail in application notes, technical/journal articles and data sheets,all of which are incorporated by reference herein.

In one embodiment, the computations that may be or are performed byaccelerator subsystems 146 a-n include, for example, anti-aliasingfiltering and down-sampling, FFTs for aerial image computation, imagefiltering and/or thresholding operations in resist modeling. Thecomputations that may be handled by microprocessor subsystem 144 a-ninclude: polygon to binary bitmap conversation, application programs orprocesses (for example, RET verification through comparison, defectmerging). The partitioning of computing tasks between microprocessorsubsystem 144 a-n and accelerator subsystems 146 a-n isapplication-dependent and may vary from application to application orjob to job. The optimal partitioning is to balance the computation timebetween accelerator subsystems 146 a-n and microprocessor subsystem 144a-n, so that neither of the two subsystems would spend much of timewaiting for the results from the other subsystems.

In one embodiment, the components of system 110, including applicationprocessing system 114 a, front end processing system 114 b andaccelerator system 116, may be mounted together as a rack-mount system.

The system 110 is capable of rapid lithography simulation, inspection,characterization and/or evaluation of the optical characteristics and/orproperties, as well as the effects and/or interactions of lithographicsystems and processing techniques. The system 110 may be employed inmany applications, for example, verification, inspection,characterization and/or evaluation of the lithographic designs,techniques and/or systems, and/or individual functions performed therebyor components used therein. Several of the applications are listed anddescribed below. It should be noted that this list of applications isnot exhaustive. Indeed, system 110 may be used in all the applicationsthat depend on lithography simulation, inspection, characterizationand/or evaluation of a semiconductor design and/or manufacturing, and assuch all applications, whether now known or later developed, areintended to be within the present invention.

In one application, system 110 may be implemented for fast RETverification, inspection and/or characterization. RET verification mayrefer to the procedure that uses detailed simulation of the entirelithography process to verify that the RET design achieves the desired,anticipated and/or acceptable results in the final wafer pattern. Thedesired, anticipated and/or acceptable results on wafer 22 are usuallypart of the design database, sometimes referred to as reference layer ordesign-target layer. The post-RET design database is also part of thedesign database. After obtaining the simulated wafer pattern using thepost-RET design database, the wafer pattern may be compared with thereference layer, and deviations may then be highlighted, characterizedand/or analyzed.

Further, interlayer characterization and/or analysis may be employed todetermine the overlay margin. For example, the overlay between contactand poly layer is critical in IC manufacturing. Too little or smalloverlay may cause a lower chip yield. The present invention may beemployed to analyze the amount of overlay margin between two related orunrelated layers, for example, by comparing their correspondinglysimulated wafer resist pattern. Notably, places or locations where themargin is too small may be highlighted to, for example, analyze ingreater detail.

The speed of simulation and/or characterization of RET designs using thepresent invention enables RET verification to be conducted at one, someor all of the different points in the process window (i.e., theacceptable lithography process variation in focus and exposure dose).While the RET design may be acceptable at certain or given points in theprocess window (a combination of a dose and a focus), it may produce toolarge of a deviation at other points in the process window. As such, amore thorough and exhaustive RET design verification includes analysisand/or simulation of all the points in the lithography process window.

Notably, the present invention may generalize the process window toinclude many other process parameters beyond focus and dose, forexample, illuminations, mask errors, stepper aberrations and/or resistthickness. In this situation, the process window becomes a volume in ahyper-dimensional space.

Besides the edge placement, line-end placement, line break/bridging, CDerrors, and/or any other errors that are determined by the on-wafer edgelocations, the present invention may be employed to analyze the waferpattern's printing sensitivity to process variation, for example, maskerror, focus, dose, numerical aperture, illumination aperture,aberration, or other process parameters. The printing sensitivity refersto the derivative of the wafer pattern error vs. the process parameterchange. The analysis can be achieved by introducing a small change inthe process parameters, and analyze the resulting wafer patterncharacteristics. The higher the sensitivity, the worse the design'srobustness is.

For example, in the context of CD sensitivity, the present invention maybe employed to analyze the following derivatives as CD's sensitivity tothose corresponding process parameters:

-   -   dCD_on_wafer/dCD_error_on_mask. Where “d” is referring to        derivative. This specific sensitivity is the derivative of the        “CD_on-wafer” vs. “CD_error_on_mask”, i.e., for a unit amount of        change in “CD_error_on_mask”, the amount of change in        “CD_on_wafer”. This sensitivity is often called as MEEF, i.e.,        Mask Error Enhancement Factor. Two sub-cases can be used:        -   Global mask error MEEF. In this case, all patterns on mask            are biased at the same time. This sensitivity relates to            mask bias variation across mask.        -   Local mask error MEEF. In this case, only a single local            pattern on mask is assumed to have CD error. This            sensitivity relates to mask defect.    -   dCD/dFocus_of_stepper, i.e., on-wafer CD's sensitivity vs.        stepper focus.    -   dCD/dDose_of_stepper, i.e., on-wafer CD's sensitivity vs.        stepper's exposure dose.    -   dCD/dAberration_of_stepper, i.e., on-wafer CD's sensitivity vs.        stepper's aberration.    -   dCD/dlllumination_pupil_of_stepper, i.e., on-wafer CD's        sensitivity vs. stepper's illumination pupil (e.g., its size and        shape, and the illumination distribution within the pupil).    -   dCD/dNA_of_stepper, i.e., on-wafer CD's sensitivity vs.        stepper's numerical aperture.    -   dCD/dThickness_of_resist, i.e., on-wafer CD's sensitivity vs.        the resist thickness on wafer. dCD/dRefractive_index_of_resist,        i.e., on-wafer CD's sensitivity vs. the resist's refractive        index on wafer.    -   dCD/dResist_stack, i.e., on-wafer CD's sensitivity vs. the        resist stack's parameters (e.g., thickness of BARC).    -   dCD/dFlare_of_stepper, on-wafer CD's sensitivity vs. the        stepper's flare amount.    -   dCD/dResist_processing_parameters, i.e., on-wafer CD's        sensitivity vs. the resist processing parameters (e.g., for        example, resist baking time, resist development time).

The above sensitivity values may be referred to asDesign-for-Manufacturability, or DFM metrics. The present invention mayemploy the DFM metrics to perform process sensitivity inspection, anddetermine the process weak points in design. That is, the presentinvention may be employed to identify design locations that have thesensitivity over certain threshold. Additional functions in this DFMmetric analysis may include:

-   -   ANOVA analysis (which is a standard technique in statistical        analysis of experimental results) to identify key sensitivity        contributing factors and interaction between the factors    -   Complete process window determination beyond Dose-Focus window    -   Identify the design locations that limit the process window    -   Give recommendations of design modifications that enhance        process window

It should be noted that all of the above analysis andverification/inspection may be conducted for the unique or genericcharacteristics of a specific or particular stepper or scanner. Forexample, a wafer fabrication facility may have a plurality of the sameor different steppers; each stepper includes own “signature” ofaberrations or characteristics. As such, the set of aberrations orcharacteristics may be incorporated into the simulation process (forexample, during the aerial image generation (box 126 of FIG. 4)) toanalyze the design's suitability for that individual stepper. Simulationfor multiple steppers may also be used to select the best stepper(s) forthe specific design.

It should also be noted that the RET verification, themulti-process-point analysis, the process-sensitivity analysis, and allother analysis mentioned above, may be applied to either full chipdesign, or in a localized region, depending on user need. Localizedregion may be particularly useful for interactive analysis and review.For example, the circuit designer may use the localized area analysis tofine-tune a design of small area libraries, or to fine-tune the smallarea design before the full chip design is complete.

The fast simulation may also be used in optimization of lithographysettings, for example, searching for enhanced and/or the optimal (i)illumination and NA settings, (ii) resist processing parameters (forexample, baking time, development time), and (iii) resist stack design(for example, resist thickness, BARC layer structure).

In fact, the fast simulation may be used in or during the RET designitself, i.e., searching for enhanced and/or the optimal RET decorationthat provides or produces the enhanced results on wafer patterning, interms of, for example, edge displacement, as compared to desired patternon wafer. The RET design may also at the same time optimize processwindow size and the DFM metrics. During RET verification and/orinspection, this design capability may also be used to producerecommended modification to RET design at defective design locations.

Further, the present invention may be employed to co-optimize orco-enhance the RET decoration and the lithography settings. For example,the OPC design may be co-optimized with illumination methodology. Byselecting appropriate illumination together with the OPC design (i.e.,optimizing the illumination and OPC design simultaneously), the presentinvention may simplify the OPC decoration without sacrificing the finalpatterning quality and robustness. Notably, this approach may reduce themask making complexity and hence reduce the mask cost.

The present invention may also be employed to enhance and/or optimizeimplementation of other RET technologies, for example,multiple-exposure. Multiple-exposure refers to the technique of breakingup the patterns into multiple exposing passes, so that each exposureonly prints part of the pattern with reduced interaction between thepatterns (due to, for example, the increased distance between thepatterns). One existing technique called “double exposure” breaks thepatterns into x- and y-oriented patterns, and employs x- and y-dipoleillumination for them, respectively. Assuming two exposures or a fixednumber of exposures, the optimal decomposition may not be as simple asan x- and y-separation, but may depend on the circuit pattern itself.The present invention may be employed to search and analyze the optimaldecomposition of the chip pattern for multiple exposures. For example,all exposures may employ the same illumination, or the illumination maybe different for each exposure in order to enhance and/or optimize theprocess.

The illumination-decomposition co-optimization may further improvelithography quality and robustness. Further, optimization can includeco-optimization together with other lithography parameters, for example,OPC design, NA, pupil filtering. Notably, all these optimization andco-optimization may be enhanced using the system and technique of thepresent invention.

Further, the system of the present invention, when equipped with theprocess parameters used in a semiconductor foundry, can serve as the“ambassador” from foundry to its chip design customers. That is, thesystem encapsulates the critical process and tool information, and usedby foundry's chip design customers to assess, measure, and optimizetheir designs for their specific foundry partner, without directlyaccessing their foundries' proprietary process details.

Moreover, the system and technique of the present invention mayfeed-forward its simulation results to metrology tools. That is, thesystem's results are provided to different metrology and inspectiontools in the mask shop and wafer fabrication facility. For instance, itmay be useful to define “context-sensitive” mask design andmanufacturing, for example, insensitive areas can have relaxedinspection tolerances. It may also help to focus the existing metrologyand inspection resources in the wafer fabrication facility so that theyconcentrate on the “marginal areas”, for example, physicalRET-design-inspection using metrology tools for those RET weak pointsidentified in multi-process window inspection and process sensitivityinspection.

The system and technique of the present invention may be combined with aconventional mask inspection system (for example, TeraScan DUV ReticleInspection System from KLA-Tencor Corporation of San Jose, Calif., USA),to conduct real-time simulated wafer pattern inspection. For example,conventional lithographic and/or mask inspection systems capturehigh-resolution image(s) of a mask. The captured, high-resolution imagesmay have a higher resolution for mask patterns than the mask pattern'saerial image printed on wafer; as such, the conventional lithographicand/or mask inspection systems may provide more data, details and/orinformation regarding the pattern disposed on the mask. Thesehigh-resolution images may be provided to the system of the presentinvention to simulate, analyze and/or characterize the predicted waferpattern either in resist and/or after substrate etching, which is inturn compared with the desired circuit pattern on wafer. When there isdeviation, a defect may be identified. Doing so not only verifies thatthe mask is fabricated according to a desired post-RET design, but alsoverifies that the realization of the RET design on mask will create thedesired results on wafer. This inspection mode is different from currentmask inspection industry's practices of D:D or D:DB inspection, sincethis inspection mode compares a simulated on-wafer in-resist orafter-etch pattern to the design target, therefore realizing aDie-To-Target (D:T) inspection mode. FIG. 7 illustrates an exemplaryprocess flow of D:T inspection.

D:T inspection mode need not use the post-RET design database. Instead,the D:T inspection mode may use the high-resolution image captured bythe mask inspection tool as the post-RET data to simulate the in-resistor after-etch image or pattern on wafer. D:T inspection technique maythen employ the simulated in-resist or after-etch pattern to compare tothe design's on-wafer target pattern.

The D:T inspection mode is a highly dynamic-per-pixel-printabilityinspection method for masks because it only captures the defects thataffect the printed wafer circuit pattern, and does not report thosedefects that do not change the wafer circuit pattern, which are known asnuisance defects (i.e., defects that do not affect chip yield). Byeliminating the nuisance defects, D:T inspection may reduce un-necessarymask “scraps”, improve mask yield, and/or reduce mask cost. D:T may alsocapture, detect and/or identify mask defects that are “below” thedetection threshold of D:D or D:DB inspection but affect the wafercircuit pattern when combined with lithography optics (of, for example,a stepper or scanner) and the wafer resist processing, thereby reducingthe possibility of wafer yield loss.

Notably, the D:T inspection technique may be integrated and/or combinedwith D:DB inspection techniques, to identify additional, false and/orundetected defects in the RET design. For example, where the D:Tinspection technique detects and/or identifies a significant defect, butD:DB inspection technique does not detect and/or identify that defect ordefective area on mask (i.e., the mask is just as designed according topost-RET database), it is likely that the RET design at the defectivearea includes or is in error (i.e., the design cannot produce thedesired wafer pattern even though the mask is made according to thatdesign).

In another aspect, D:T inspection may also improve the inspectability ofmasks. The small and complex OPC features make traditional D:D or D:DBinspection very challenged. Many small OPC feature may be flagged as“defect” (i.e., false defect), reducing the inspectability and hencecreating constrains in OPC design. With D:T inspection, thehigh-resolution image is directly used to simulate the on-waferin-resist or after-etch pattern, where all small OPC features have beenfiltered out. The comparison to design target no longer involves smallOPC features and hence false defect rate may be reduced.

Notably, the product literature, application notes, technical/journalarticles, and operator's manual(s) of the TeraScan DUV ReticleInspection System from KLA-Tencor Corporation are incorporated byreference herein.

In another embodiment for mask inspection technique according to thepresent inventions, the systems, devices and/or techniques described andillustrated in non-provisional patent application “System and Method forLithography Process Monitoring and Control”, which was filed on Mar. 18,2003 and assigned Ser. No. 10/390,806 (hereinafter “Lithography ProcessMonitoring and Control Patent Application”), may be employed, inconjunction with the invention(s) of the present invention, to measure,inspect, characterize and/or evaluate optical lithographic equipment,methods, and/or sub-systems related thereto (for example, the opticalsub-systems and control systems of the equipment as well as photomasksused therewith). In this regard, the aerial image(s) sampled and/orcollected using the systems and techniques of the Lithography ProcessMonitoring and Control Patent Application may be provided to the systemof the present invention to compare with the simulated and/or predictedwafer pattern. In this mode, the system of the present inventionprovides the simulated aerial image using the post-RET database and theoptical settings of the lithographic equipment (notably, the resistdevelopment and substrate etch simulations are omitted if only aerialimage is needed), and the systems and techniques of the LithographyProcess Monitoring and Control Patent Application provide the actualaerial image captured from inside the lithographic equipment. This maybe done on a pixel-by-pixel basis to identify deviations/defectstherebetween.

In particular, this mask inspection technique detects or identifiesdefects in a lithographic design using a simulated lithographic designand a measured aerial image of the lithographic design. The methodincludes generating a pixel-based bitmap representation of thelithographic design, wherein the pixel-based bitmap includes pixel data,and each pixel datum represents a pixel having a predetermined pixelsize (as described above). The method generates a simulated aerial imageof the lithographic design using the pixel-based bitmap representationof the lithographic design.

The method further includes measuring image data to generate a measuredaerial image of the lithographic design wherein the measured aerialimage is a pixel-based bitmap representation of the lithographic designproduced by a lithographic tool at a wafer plane. Thereafter, the methodcompares the measured aerial image of the lithographic design and thesimulated aerial image of the lithographic design to detect potentialerrors in the lithographic design. Moreover, the method may also comparethe simulated aerial image of the lithographic design to a desired,predetermined pattern contained in a database.

As described above, the pixel-based bitmap representation of thelithographic design may include converting a plurality of polygonsarranged in a predetermined configuration to a pixel-based bitmaprepresentation thereof. The pixel-based bitmap may be a gray-level imagewhich is representative of the plurality of polygons.

Further, the pixel size may be determined as described above. In oneembodiment, the pixel size may be greater than the Nyquist frequency inthe aerial image of the lithographic design and/or determined using thenumerical aperture and wavelength of a projection optics of alithographic tool.

Of course, this method may be implemented on one or more of theembodiments of the system of the present invention. Indeed, all of theembodiments, inventions, features and/or techniques described above withrespect of the other inspection techniques may be implemented in themask inspection technique that detects or identifies defects in alithographic design using a simulated lithographic design and a measuredaerial image of the lithographic design. For the sake of brevity, thosediscussions will not be repeated.

Notably, as mentioned above, the inventions described and illustrated inthe aforementioned patent application may be employed to collect actualwafer pattern for mask inspection. For the sake of brevity, thosediscussions will not be repeated here; rather, it is expressly noted,however, that the entire contents of the aforementioned patentapplication, including, for example, the features, attributes,alternatives, materials, techniques and advantages of all of theinventions, are incorporated by reference herein.

There are many inventions described and illustrated herein. Whilecertain embodiments, features, materials, configurations, attributes andadvantages of the inventions have been described and illustrated, itshould be understood that many other, as well as different and/orsimilar embodiments, features, materials, configurations, attributes,structures and advantages of the present inventions that are apparentfrom the description, illustration and claims. As such, the embodiments,features, materials, configurations, attributes, structures andadvantages of the inventions described and illustrated herein are notexhaustive, and it should be understood that such other, similar, aswell as different, embodiments, features, materials, configurations,attributes, structures and advantages of the present inventions arewithin the scope of the present invention.

In particular, in one application, this system facilitates and enablesrapid verification or inspection of RET design. This refers to theprocedure that uses detailed simulation of the entire lithographyprocess to verify, characterize and/or analyze a RET design, includingwith respect to the desired/anticipated results on final wafer pattern.

1-35. (canceled)
 36. A method for evaluating a design pattern on aphotolithographic mask, the method comprising: generating a pixel-basedbitmap of the design pattern on the photolithographic mask using animage of the photolithographic mask; generating a simulated image of thedesign pattern in wafer resist using (1) the pixel-based bitmap of thedesign pattern on the photolithographic mask and (2) a relationshiprepresenting the imaging path of the projection and illumination opticsof a photolithographic tool; and comparing the simulated image of thedesign pattern in wafer resist and a design target on the wafer whichcorresponds to the design pattern on the photolithographic mask.
 37. Themethod of claim 36 wherein generating the simulated image of the designpattern in wafer resist further includes determining edge locations ofthe design pattern in resist.
 38. The method of claim 37 whereingenerating the simulated image of the design pattern in wafer resistfurther includes connecting edge points of the design pattern in resist.39. The method of claim 36 wherein generating the simulated image of thedesign pattern in wafer resist further includes generating a threedimensional intensity distribution of the simulated image of the designpattern in resist.
 40. The method of claim 36 wherein generating asimulated image of the design pattern in wafer resist further includesgenerating a two dimensional image distribution of the simulated imageof the design pattern in resist.
 41. The method of claim 40 whereingenerating the two dimensional image distribution is representative ofthe simulated image of the design pattern in wafer resist at apredetermined distance from the surface of the wafer.
 42. The method ofclaim 36 wherein the pixel-based bitmap of the design pattern on thephotolithographic mask includes pixel data, wherein each pixel datumrepresents a pixel having a predetermined pixel size.
 43. The method ofclaim 42 wherein the predetermined pixel size provides a samplingfrequency that is greater than the Nyquist frequency in the image of thedesign pattern.
 44. The method of claim 42 wherein the predeterminedpixel size is determined using the numerical aperture and wavelength ofthe projection optics of the photolithographic tool.
 45. The method ofclaim 42 wherein the design pattern on the photolithographic maskincludes resolution enhancement technology.
 46. The method of claim 36wherein the relationship representing the imaging path of the projectionand illumination optics is a coefficient matrix representing the imagingpath of the projection and illumination optics of the photolithographictool.
 47. The method of claim 46 wherein the coefficient matrixrepresenting the imaging path of the projection and illumination opticsis representative of one or more of a focus, dose, numerical aperture,illumination aperture, and aberration of the photolithographic tool. 48.The method of claim 46 wherein the coefficient matrix representing theimaging path of the projection and illumination optics of thelithographic tool includes transmission cross coefficients.
 49. Themethod of claim 36 wherein generating a simulated image of the designpattern in wafer resist includes generating a simulated image of thedesign pattern in resist using forward and backward Fast FourierTransforms.
 50. The method of claim 36 wherein the relationshiprepresenting the imaging path of the projection and illumination opticsof a photolithographic tool includes formulas including a focus, dose,numerical aperture, illumination aperture, and aberration of thephotolithographic tool.
 51. A system for evaluating a design pattern ona lithographic mask, the system comprising: a microprocessor subsystem,including a plurality of microprocessors; and a plurality of acceleratorsubsystems, each accelerator subsystem includes a plurality ofprogrammable integrated circuits configured to process a pixel-basedbitmap of the design pattern on the lithographic mask in parallel, andeach accelerator subsystem is connected to an associated microprocessorto calculate a portion of a simulated image of the design pattern inwafer resist using (1) a corresponding portion of the pixel-based bitmaprepresentation of the design pattern which is generated using an imageof the lithographic mask and (2) a relationship representing the imagingpath of the projection and illumination optics of a photolithographictool; and a data processing system to compare the simulated image of thedesign pattern in wafer resist and a design target on the wafer whichcorresponds to the design pattern on the lithographic mask.
 52. Thesystem of claim 51 wherein the pixel-based bitmap uses a predeterminedpixel size, and the predetermined pixel size provides a samplingfrequency that is greater than the Nyquist frequency in the image of thedesign pattern.
 53. The system of claim 51 wherein the pixel-basedbitmap uses a predetermined pixel size, and the predetermined pixel sizeis determined using the numerical aperture and wavelength of theprojection optics of the lithographic tool.
 54. The system of claim 51wherein the accelerator subsystems perform Fast Fourier Transforms,using pixel data, to generate the corresponding portion of the simulatedimage of the design pattern on the lithographic mask in wafer resist.55. The system of claim 51 wherein the relationship representing theimaging path of the projection and illumination optics includes acoefficient matrix representing the imaging path of the projection andillumination optics of the lithographic tool.
 56. The system of claim 55wherein the coefficient matrix representing the imaging path of theprojection and illumination optics of the lithographic tool isrepresentative of one or more of a focus, dose, numerical aperture,illumination aperture, and aberration of the lithographic tool.
 57. Themethod of claim 55 wherein the coefficient matrix representing theimaging path of the projection and illumination optics of thelithographic tool are transmission cross coefficients.
 58. The system ofclaim 51 wherein the system determines a set of parameters representingthe imaging path of the projection and illumination optics of thelithographic tool using the one or more of a focus, dose, numericalaperture, illumination aperture, and aberration of the lithographictool.
 59. The system of claim 51 wherein the plurality of acceleratorsubsystems further calculate a three dimensional intensity distributionof the simulated image of the design pattern in wafer resist.
 60. Thesystem of claim 51 wherein the plurality of accelerator subsystemsfurther calculate a two dimensional image distribution of the simulatedimage of the design pattern in wafer resist.
 61. The system of claim 60wherein the two dimensional image distribution is representative of animage of the design pattern in wafer resist at a predetermined distancefrom the surface of the wafer.
 62. The system of claim 51 wherein theaccelerator subsystems perform forward and backward Fast FourierTransforms, using pixel data, to generate the corresponding portion ofthe simulated image of the design pattern in resist.
 63. A method forevaluating a design pattern on a lithographic mask, the methodcomprising: generating a simulated image of the design pattern in waferresist using (1) a pixel-based bitmap of the design pattern on thelithographic mask which is generated using an image of the lithographicmask and (2) a relationship representing the imaging path of theprojection and illumination optics of a photolithographic tool; andcomparing the simulated image of the design pattern in wafer resist anda design target on the wafer which corresponds to the design pattern onthe lithographic mask.
 64. The method of claim 63 wherein generating thesimulated image of the design pattern in wafer resist includesdetermining edge locations of the design pattern in resist.
 65. Themethod of claim 64 wherein generating the simulated image of the designpattern in wafer resist includes connecting edge points of the designpattern in resist.
 66. The method of claim 63 wherein generating thesimulated image of the design pattern in wafer resist further includesgenerating a three dimensional intensity distribution of the simulatedimage of the design pattern in resist.
 67. The method of claim 63wherein generating the simulated image of the design pattern in waferresist further includes generating a two dimensional image distributionof the simulated image of the design pattern in resist at predetermineddistance from the surface of a wafer.
 68. The method of claim 63 whereinthe design pattern on the lithographic mask includes resolutionenhancement technology.
 69. The method of claim 63 wherein therelationship representing the imaging path of the projection andillumination optics of a photolithographic tool includes one or more ofa focus, dose, numerical aperture, illumination aperture, and aberrationof the lithographic tool.
 70. The method of claim 63 wherein therelationship representing the imaging path of the projection andillumination optics includes a coefficient matrix representing theimaging path of the projection and illumination optics of thelithographic tool.
 71. The method of claim 70 wherein the coefficientmatrix representing the imaging path of the projection and illuminationoptics of the lithographic tool includes transmission crosscoefficients.
 72. The system of claim 70 wherein the coefficient matrixrepresenting the imaging path of the projection and illumination opticsof the photolithographic tool is representative of one or more of afocus, dose, numerical aperture, illumination aperture, and aberrationof the lithographic tool.
 73. The method of claim 63 wherein generatinga simulated image of the design pattern in wafer resist includes usingFast Fourier transforms.